A New Design and Optimization of Capacitive MEMS Accelerometer

Mohammad Sarvghadmoghadam (Sadjad Institute of High Education of Mashhad, Iran)

In this paper, design and optimization of a folded beam for a shunt capacitive MEMS accelerometer is presented together with a comparison of important parameters to five beams with different geometries in range of 20g -100g for crash detection. The structure contains a proof mass which is suspended over fixed rigid pull-down electrode to provide capacitance measurement. Powerful soft wares (COVENTOR, ANSYS and MATLAB) are used for finite element analysis (FEA) modeling and simulation. In order to have a good comparison, nonlinear dynamic models such as elastic deformation, residual stress, and squeeze film damping, Q-factor, stiffness coefficient, resonant frequency, electrostatic in addition to some other important parameters on mechanical performance have been studied. The results obtained from both the analytical and finite element models proved to be desirable.

Journal: International Journal of Simulation- Systems, Science and Technology- IJSSST V14

Published: Feb 28, 2013

DOI: 10.5013/IJSSST.a.14.01.04